Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...

Optical inspection always has been the workhorse technology for finding defects in chips. It’s fast, cost-efficient, and generally reliable enough for most chips. But as logic scales into the angstrom ...

Optical surface defect inspection and imaging techniques are pivotal to ensuring high-performance outcomes across a myriad of applications including semiconductor manufacturing, precision optics, and ...